OPUS: An optically parallel ultrasound sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3912, Issue , 2000, Pages 64-73

  Kallman, Jeffrey S ^a   Ashby, A Elaine ^a   Ciarlo, Dino R ^a   Thomas, Graham H ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; OPTICAL SENSORS; SILICON NITRIDE; ULTRASONIC TRANSDUCERS; ULTRASONIC TRANSMISSION;

OPTICALLY PARALLEL ULTRASOUND SENSOR (OPUS);

BIOSENSORS;

EID: 0033899004     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (11)