Giant magnetostriction thin films for multi-cantilever micro-structures driving

Sensors and Actuators, A: Physical

Volumn 81, Issue 1, 2000, Pages 162-165

  Tiercelin, N ^a   Pernod, P ^a   Preobrazhensky, V ^a   Le Gall, H ^b   Youssef, J Ben ^b   Mounaix, P ^a   Lippens, D ^a  

^a INSTITUT D ELECTRONIQUE   (France)

^b Lab de Physique des Solides de   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS ALLOYS; AMORPHOUS FILMS; COERCIVE FORCE; MAGNETOSTRICTION; MAGNETOSTRICTIVE DEVICES; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; TERBIUM ALLOYS; THIN FILM DEVICES;

BIMORPH MICROCANTILEVER; GIANT MAGNETOSTRICTION THIN FILMS; TERBIUM IRON ALLOYS;

MICROSENSORS;

EID: 0033896531     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00144-2     Document Type: Article

References (5)

1. E. Quandt, K. Seemann, Fabrication of giant magnetostrictive thin film actuators, IEEE Trans. Magn., 1995, pp. 273-277.
2. T. Honda, K.I. Arai, M. Yamaguchi, Fabrication of actuators using magnetostrictive thin films, Proc. MEMS 1994 (1994) 51-56.
3. P. Mounaix, P. Delobelle, X. Mélique, L. Bornier, D. Lippens, Micromachining and mechanical properties of GaInAs/InP microcantilevers, Mat. Sci. Eng. B 51 (1998) 258-262.
4. P. Pernod, V. Preobrazhensky, Dynamic control of elasticity by means of ultrasound excitation in antiferromagnet, J. Magn. Magn. Mat. 184 (1998) 173-178.
5. P. Pernod, V. Preobrazhensky, Non-linear conversion of magnetoelastic modes in a magnetostrictive plate, J. Magn. Magn. Mat., in press.