Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

Sensors and Actuators, A: Physical

Volumn 80, Issue 2, 2000, Pages 189-196

  Wiegerink, Remco ^a   Zwijze, Robert ^a   Krijnen, Gijs ^a   Lammerink, Theo ^a   Elwenspoek, Miko ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FORCE MEASUREMENT; MICROMACHINING; SEMICONDUCTING SILICON;

FORCE SENSORS; MEASUREMENT ELECTRONICS;

MICROSENSORS;

EID: 0033894359     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00265-4     Document Type: Article

References (7)

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2. Tilmans H.A.C., Elwenspoek M. Quasi-monolithic planar load cells using built-in resonant strain gauges. J. Micromech. Microeng. 3:1993;193-197.
3. W. Kern, Handbook of Semiconductor Wafer Cleaning Technology, Noyes Publications, Westwood, NJ, USA, 1993.
4. Martin K. A voltage-controlled switched-capacitor relaxation oscillator. IEEE J. Solid-State Circuits. 16(4):1981;412-413.
5. Toth F.N., Meijer G.C.M. A low-cost, smart capacitive position sensor. IEEE Trans. Instrum. Meas. 41(6):1992;1041-1044.
6. F.N. Toth, A design methodology for low-cost, high-performance capacitive sensors, PhD Thesis, Delft Univ. of Technology, Delft, The Netherlands, 1997, pp. 74-77.
7. R.J. Wiegerink, A.F. Zwijze, R. Mateman, G.J.M. Krijnen, T.S.J. Lammerink, M.C. Elwenspoek, Quasi-monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing, to be published in Proc. Eurosensors XIII, The Hague, The Netherlands, Sept. 12-15, 1999.