Nuclear reaction analysis of hydrogen migration in silicon dioxide films on silicon under15N ion irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 161-163, Issue , 2000, Pages 682-685

  Ecker, K H ^a   Krauser, J ^b   Weidinger, A ^b   Weise, H P ^a   Maser, K ^c  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

^b HAHN MEITNER INSTITUT   (Germany)

^c TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

Hydrogen; Radiation enhanced diffusion; RNRA; SiO2 Si

Indexed keywords

CHEMICAL ANALYSIS; DIFFUSION IN SOLIDS; ION BEAMS; ION BOMBARDMENT; NITROGEN; SILICA; SILICON; THIN FILMS;

NUCLEAR REACTION ANALYSIS; TRANSITION REGION;

HYDROGEN;

EID: 0033893707     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00830-7     Document Type: Article

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