Improved laser ablation method using a shadow mask (eclipse method)

Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi)

Volumn 130, Issue 1, 2000, Pages 88-94

  Tachiki, Minoru ^a   Kobayashi, Takeshi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; BISMUTH; CRYSTAL GROWTH; DROP FORMATION; FILM GROWTH; MASKS; SUBSTRATES; SUPERCONDUCTING FILMS; YTTRIUM BARIUM COPPER OXIDES;

ECLIPSE ANGLE METHOD; ECLIPSE METHOD; SHADOW MASK METHOD;

LASER ABLATION;

EID: 0033890280     PISSN: 04247760     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1520-6416(200001)130:1<88::AID-EEJ11>3.0.CO;2-L     Document Type: Article

References (10)

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7. 3 thin films with an atomically smooth surface. Jpn J Appl Phys 1993;32:L687.
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