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Volumn 43, Issue 1, 2000, Pages
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2000 Begins with a revised industry `Roadmap'
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CMOS INTEGRATED CIRCUITS;
LITHOGRAPHY;
SEMICONDUCTOR DOPING;
TECHNOLOGY TRANSFER;
RED-BOX WALL;
SEMICONDUCTOR DEVICE MANUFACTURE;
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EID: 0033889152
PISSN: 0038111X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
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Times cited : (3)
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References (0)
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