Study of Pt/Ge interaction in a lateral diffusion couple by microbeam Rutherford backscattering spectrometry

Thin Solid Films

Volumn 358, Issue 1, 2000, Pages 270-276

  Nemutudi, R S ^a   Comrie, C M ^a   Churms, C L ^b  

^a UNIVERSITY OF CAPE TOWN   (South Africa)

^b NATIONAL ACCELERATOR CENTRE   (South Africa)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIFFUSION IN SOLIDS; GERMANIUM; PLATINUM; PROBES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SPECTROMETRY; THIN FILMS;

NUCLEAR MICROPROBES;

METALLIC FILMS;

EID: 0033889124     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00679-3     Document Type: Article

References (10)

1. Zheng L.R., Hung L.S., Mayer J.W. J. Vac. Sci. Technol. A. 1:1983;758.
2. Chen S.H., Zheng L.R., Carter C.B., Mayer J.W. J. Appl. Phys. 57:1985;258.
3. Chen S.H., Zeng L.R., Barbour J.C., Zingu E.C., Hung L.S., Carter C.B., Mayer J.W. Mater. Lett. 2:1984;469.
4. Liu J.C., Mayer J.W. J. Appl. Phys. 64:1988;656.
5. Liu J.C., Mayer J.W. J.C. Babour, J. Appl. Phys. 64:1988;651.
6. Ding P.J., Talev R., Lanford W.A., Hymes S., Murarka S.P. Nucl. Instrum. Methods B. 85:1994;17.
7. Hsieh Y.F., Chen L.J. J. Appl. Phys. 63:1988;1177.
8. Marshall E.D., Wu C.S., Pai C.S., Scott D.M., Lau S.S. Symp. Proc. 47:1985;161.
9. Grimaldi M.G., Wielunski L., Nicolet M.A. Thin Solid Films. 81:1981;207.
10. R. Nemutudi, M.Sc. thesis, University of Cape Town, 1997.