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Volumn 36, Issue 4, 2000, Pages 332-334

Thick-film magnetostrictive material for MEMS

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVE PASTES; MAGNETIC DEVICES; MAGNETOSTRICTION; MICROELECTROMECHANICAL DEVICES;

EID: 0033888584     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20000264     Document Type: Article
Times cited : (21)

References (9)
  • 1
    • 0033317599 scopus 로고    scopus 로고
    • Thick-film PZT/ micromachined silicon accelerometer
    • BEEBY, S.P., ROSS, N., and WHITE, N.M.: 'Thick-film PZT/ micromachined silicon accelerometer', Electron. Lett., 1999, 35, (23), pp. 2060-2062
    • (1999) Electron. Lett. , vol.35 , Issue.23 , pp. 2060-2062
    • Beeby, S.P.1    Ross, N.2    White, N.M.3
  • 3
    • 0029490163 scopus 로고
    • Development, application, markets, and patent situation of magnetostrictive Terfenol-D
    • McMASTERS, O.D.: 'Development, application, markets, and patent situation of magnetostrictive Terfenol-D', J. Rare Earths, 1995, 13, (4), pp. 295-301
    • (1995) J. Rare Earths , vol.13 , Issue.4 , pp. 295-301
    • McMasters, O.D.1
  • 4
    • 0032303924 scopus 로고    scopus 로고
    • MEMS actuators based on smart film materials
    • September
    • QUANDT, E.: 'MEMS actuators based on smart film materials'. SPIE, September 1998, Vol. 3514, pp. 136-146
    • (1998) SPIE , vol.3514 , pp. 136-146
    • Quandt, E.1
  • 5
    • 84884127459 scopus 로고
    • Design and fabrication of thick-film sensors
    • WHITE, N.M., and CRANNY, A.W.J.: 'Design and fabrication of thick-film sensors', Hybrid Circuits, 1987, (12), pp. 32-35
    • (1987) Hybrid Circuits , Issue.12 , pp. 32-35
    • White, N.M.1    Cranny, A.W.J.2
  • 6
    • 0024064279 scopus 로고
    • Sensor applications of thick-film technology
    • BRIGNELL, J.E., WHITE, N.M., and CRANNY, A.W.J.: 'Sensor applications of thick-film technology', IEE Proc. I, 1988, 135, (4), pp. 77-84
    • (1988) IEE Proc. I , vol.135 , Issue.4 , pp. 77-84
    • Brignell, J.E.1    White, N.M.2    Cranny, A.W.J.3
  • 7
    • 0023384444 scopus 로고
    • Analysis of an interferometric optical fibre detection technique applied to silicon vibrating sensors
    • ANDRES, M.V., FOULDS, K.H.W., and TUDOR, M.J.: 'Analysis of an interferometric optical fibre detection technique applied to silicon vibrating sensors', Electron. Lett., 1987, 23, pp. 774-775
    • (1987) Electron. Lett. , vol.23 , pp. 774-775
    • Andres, M.V.1    Foulds, K.H.W.2    Tudor, M.J.3
  • 8
    • 0031210252 scopus 로고    scopus 로고
    • Magnetostrictive particulate actuators: Configuration, modelling and characterization
    • ANJANAPPA, M., and WU, Y.: 'Magnetostrictive particulate actuators: configuration, modelling and characterization', Smart Mater. Structures, 1997, 6, pp. 393-402
    • (1997) Smart Mater. Structures , vol.6 , pp. 393-402
    • Anjanappa, M.1    Wu, Y.2
  • 9
    • 36449004552 scopus 로고
    • Magnetostriction, elastic moduli, and coupling factors of composite Terfenol-D
    • SANDLUND, L., FAHLANDER, M., CEDELL, T., CLARK, A.E., RESTORFF, J.B., and WUN-FOGLE, M.: 'Magnetostriction, elastic moduli, and coupling factors of composite Terfenol-D', J. Appl. Phys., 1994, 75, (10), pp. 5656-5658
    • (1994) J. Appl. Phys. , vol.75 , Issue.10 , pp. 5656-5658
    • Sandlund, L.1    Fahlander, M.2    Cedell, T.3    Clark, A.E.4    Restorff, J.B.5    Wun-Fogle, M.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.