Laser water-jet based dicing

European Semiconductor

Volumn 22, Issue 4, 2000, Pages

  Kaufmann, Thomas ^a   Frauenhoffer, Frank ^a   Dorner, Johann ^a  

^a FRAUNHOFER INSTITUTE FOR MANUFACTURING ENGINEERING AND AUTOMATION IPA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COOLING; COST EFFECTIVENESS; FIBER OPTICS; JETS; LASER BEAM CUTTING; LIGHT REFLECTION; NEODYMIUM LASERS; PRESSURE EFFECTS; RELIABILITY; THERMAL EFFECTS; THERMAL STRESS; YIELD STRESS;

HIGH PRESSURE WATER JETS; SEMICONDUCTOR DEVICE SINGULATION; WATER JET GUIDED LASER TECHNIQUE;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0033887149     PISSN: 02656027     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)