Correlation between the structural and optical properties of ion assisted afnia thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3902, Issue , 2000, Pages 194-203

  Scaglione, Salvatore ^a   Sarto, Francesca ^a   Alvisi, Marco ^a   Rizzo, Antonella ^a   Perrone, M R ^a   Protopapa, M L ^a  

^a ENEA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; EVAPORATION; FILM GROWTH; GRAIN SIZE AND SHAPE; HAFNIUM COMPOUNDS; LASER DAMAGE; OPTICAL COATINGS; SPECTROPHOTOMETRY; TEXTURES; THIN FILMS; ULTRAVIOLET RADIATION; X RAY DIFFRACTION ANALYSIS;

AFNIA THIN FILMS;

OPTICAL FILMS;

EID: 0033885065     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)