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Volumn 23, Issue 1, 2000, Pages
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Who will gamble at 0.13 μm?
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
APPLICATION SPECIFIC INTEGRATED CIRCUITS;
CMOS INTEGRATED CIRCUITS;
DYNAMIC RANDOM ACCESS STORAGE;
INTEGRATED CIRCUIT LAYOUT;
INTERCONNECTION NETWORKS;
INTERDIFFUSION (SOLIDS);
MASKS;
MICROPROCESSOR CHIPS;
PHOTORESISTS;
CRITICAL DIMENSION (CD) DISPERSION;
SYSTEM-ON-CHIP DEVICES;
TRANSIENT ENHANCED DIFFUSIONS (TED);
SEMICONDUCTOR DEVICE MANUFACTURE;
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EID: 0033883928
PISSN: 01633767
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (4)
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References (0)
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