Thickness-dependent electrical properties of Pb(Zr, Ti)O3 thin film capacitors for memory device applications

Journal of the Electrochemical Society

Volumn 147, Issue 1, 2000, Pages 326-329

  Kundu, T K ^a   Lee, Joseph Ya Min ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; CURRENT DENSITY; DIGITAL STORAGE; ELECTRIC SPACE CHARGE; FILM PREPARATION; GRAIN BOUNDARIES; SEMICONDUCTING LEAD COMPOUNDS; SPUTTERING; THIN FILMS;

RADIO-FREQUENCY SPUTTERING METHOD;

DIELECTRIC FILMS;

EID: 0033882515     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1393194     Document Type: Article

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