Fuzzy-logic-based process modeling using limited experimental data

Engineering Applications of Artificial Intelligence

Volumn 13, Issue 2, 2000, Pages 121-135

  Lou, H H ^a   Huang, Y L ^a  

^a Wayne State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FUZZY SETS; MATHEMATICAL MODELS;

FUZZY IMPLICATION;

PROCESS CONTROL;

EID: 0033882040     PISSN: 09521976     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0952-1976(99)00057-3     Document Type: Article

References (28)

1. Babuska R. Designing fuzzy control systems with MATLAB and SIMULINK. Proceedings of 2nd European Congress on Intelligent Techniques and Soft Computing. Aachen, Germany, September 20-23 :1994;269-273.
2. Chambers A. EPA wants to tighten power plant emission limits. Power Engineering. 100:(9):1996;4-5.
3. Coburn J.W., Chen M. Optical emission spectroscopy of reactive plasmas: a method for correlating emission intensities to reactive particle density. J. Appl. Phy. 51:1980;3134-3140.
4. Derringer G.C. Response surfaces. Hill H.E., Prane J.W. Applied Techniques in Statistics for Selected Industries. 1984;427-459 Wiley, New York.
5. Filev D. Fuzzy modeling of complex systems. Int. J. Approximate Reasoning. 5:1991;281-290.
6. Flamm D.L., Herb G.K. Plasma etching technology - an overview. Manos D.M., Flamm D.L. Plasma Etching: An Introduction. 1989;1-90 Academic Press, San Diego.
7. X constraints. IEEE Computer Applications in Power. 5:1992;10-14.
8. Himmelblau D.W. Process Analysis by Statistical Methods. 1970;Wiley, New York.
9. Hobbs, B.F., 1992. Emissions dispatch under the underulitization provision of the 1990 US Clean Air Act Amendments: models and analysis. Presented at the 1992 Winter Power Meeting, Paper No. 92, WM 138-8 PWRS, February, New York.
10. Huang Y.L., Edgar T.F., Himmelblau D.M., Tractenberg I. Constructing a reliable neural network model with limited experimental data. IEEE Trans. Semicond. Manufact. 7:(8):1994;333-344.
11. Lamont J.W., Gent M.R. Environmentally-oriented dispatching techniques. Proceedings of the 8th PICA Conference. Minneapolis, MN :1973;421-427.
12. Lamont J.W., Obessis E.V. Emission dispatch models and algorithms for the 1990s. IEEE Trans. Power Sys. 10:(5):1995;941-947.
13. Mason R.L., Gunst R.F., Hess J.L. Statistical Design and Analysis of Experiments. 1989;Wiley, New York.
14. May G.S., Huang J., Spanos C.J. Statistical experimental design in plasma etch modeling. IEEE Trans. Semicond. Manufact. 4:(5):1991;83-98.
15. McLaughlin, K.J., 1989. Development of techniques for real-time monitoring and control in plasma etching. Ph.D. dissertation. The University of Texas at Austin, TX.
16. 2 etching of silicon and silicon dioxide. J. Electrochem. Soc. 138:(3):1991;789-799.
17. Nakamori Y., Ryoke M. Identification of fuzzy prediction models through hyperellipsoidal clustering. IEEE Trans. on Sys., Man, and Cybernt. 24:(8):1994;1153-1172.
18. Pedrycz W. Fuzzy modeling: methodology, algorithms, and practice. Zurada J.M., Marks R.J. II, Robinson C.J. Computational Intelligence: Imitating Life. 1994;92-103 IEEE Press, New York.
19. Pedrycz W., Lam P.C.F., Rocha A.F. Distributed fuzzy system modeling. IEEE Trans. Sys. Man, and Cybernt. 25:(5):1995;769-780.
20. Rosenkrantz W.A. Introduction to Probability and Statistics for Scientists and Engineers. 1997;McGraw-Hill, New York.
21. 4 in a tubular-alumina fast-flow reactor. J. Appl. Phys. 50:1979;4962-4968.
22. Sugeno M., Kang G.T. Structure identification of fuzzy model. Fuzzy Sets Syst. 28:1988;15-33.
23. Takagi T., Sugeno M. Fuzzy identification of systems and its applications to modeling and control. IEEE Trans. Syst., Man, and Cybernt. 15:(1/2):1985;116-132.
24. Talag J.H., El-Hawary F., El-Hawary M.E. A summary of environmental/economic dispatch algorithms. IEEE Trans. Power Sys. 9:(8):1994;1508-1516.
25. Tan J., Xie H., Lee Y.C. Efficient establishment of a fuzzy logic model for process modeling and control. IEEE Trans. Semicond. Manufact. 8:(1):1995;50-61.
26. Terano T., Asai K., Sugeno M. Fuzzy Systems Theory and its Applications. 1987;Academic Press, San Diego, CA.
27. Zadeh L.A. Fuzzy sets. Informat. Control. 8:1965;338-353.
28. Zimmermann H.J. Fuzzy Set Theory and Its Applications. 2nd ed. 1991;Kluwer Academic Publishers, Boston, MA.