On-line monitoring of boron in dichlorosilane by means of inductively coupled plasma atomic emission spectrometry (ICP-AES)

Journal of analytical atomic spectrometry

Volumn 15, Issue 3, 2000, Pages 277-279

  Eschwey, M ^a   Pulvermacher, E ^a   Benninghoff, C ^b   Telgheder, U ^b  

^a Messer Griesheim GmbH   (Germany)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; BORON; CHLORINE COMPOUNDS; EMISSION SPECTROSCOPY; PLASMA DIAGNOSTICS; SILANES;

DICHLOROSILANE; INDUCTIVELY COUPLED PLASMA ATOMIC EMISSION SPECTROMETRY (ICP-AES);

ATOMIC SPECTROSCOPY;

EID: 0033882018     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/a908634j     Document Type: Article

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