Cleaning of large area by excimer laser ablation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3887, Issue , 2000, Pages 316-325

  Sentis, Marc L ^a   Delaporte, Philippe ^a   Marine, Wladimir ^a   Uteza, Olivier ^a  

^a AIX MARSEILLE UNIVERSITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; DECONTAMINATION; EXCIMER LASERS; FIBER LASERS; LASER ABLATION; SUBSTRATES; SURFACE TREATMENT;

PLASMA EXPANSION; SURFACE-LASER INTERACTION;

HIGH POWER LASERS;

EID: 0033881741     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (24)