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Sensors and Actuators, A: Physical

Volumn 81, Issue 1, 2000, Pages 324-327

Development of magnetoresistive sensors based on planar Hall effect for applications to microcompass

(4) Montaigne, François a,b Schuhl, Alain a,c Van Dau, Frédéric Nguyen a,d Encinas, Armando a,e

a INSTITUT D'OPTIQUE GRADUATE SCHOOL (France)

b Unité Mixte CNRS THOMSON

c Central Research Laboratory

d THALES (France)

e UNIVERSITÉ PARIS SACLAY (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPASSES (MAGNETIC); HALL EFFECT TRANSDUCERS; IRON ALLOYS; MAGNETIC ANISOTROPY; MAGNETIC FIELD MEASUREMENT; MAGNETIZATION; MAGNETORESISTANCE; PRECISION ENGINEERING; SILICON; SPUTTERING; SUBSTRATES;

MAGNETORESISTIVE SENSORS; MICROCOMPASS;

SENSORS;

EID: 0033880071 PISSN: 09244247 EISSN: None Source Type: None
DOI: 10.1016/S0924-4247(99)00102-8 Document Type: Article

Times cited : (53)

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