Formation of ions in glow discharge mass spectrometry ion sources

Materials Transactions, JIM

Volumn 41, Issue 2, 2000, Pages 346-352

  Itoh, Shinji ^a   Hasegawa, Ryosuke ^a   Amano, Muneyuki ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; ION BEAMS; ION SOURCES; MASS SPECTROMETRY; RARE EARTH ELEMENTS;

GLOW DISCHARGE MASS SPECTROMETRY; HIGH PURITY METAL CATHODE; ION BEAM RATIO;

IONS;

EID: 0033878890     PISSN: 09161821     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans1989.41.346     Document Type: Article

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