Coated optics for DUV-excimer laser applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3902, Issue , 2000, Pages 514-527

  Ullmann, J ^a   Mertin, M ^a   Lauth, H ^a   Bernitzki, H ^a   Mann, K ^a   Ristau, D ^a   Arens, W ^a   Thielsch, R ^a   Kaiser, N ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALORIMETRY; EXCIMER LASERS; INFRARED SPECTROSCOPY; LASER PULSES; OPTICAL COATINGS; OPTICAL FILMS; ULTRAVIOLET RADIATION;

DEEP ULTRAVIOLET (DUV)-EXCIMER LASERS; RADIATION RESISTANCE;

LASER OPTICS;

EID: 0033878136     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)