Laser doping in Si, InP and GaAs

Applied Surface Science

Volumn 154, Issue , 2000, Pages 712-715

  Pokhmurska, A ^a   Bonchik, O ^a   Kiyak, S ^a   Savitski, G ^a   Gloskovsky, A ^a  

^a INSTITUTE OF HYDROBIOLOGY   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE LASERS; CONTINUOUS WAVE LASERS; CRYSTAL IMPURITIES; DIFFUSION; LASER APPLICATIONS; LASER BEAM EFFECTS; OHMIC CONTACTS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DOPING;

LASER DOPING;

SEMICONDUCTOR JUNCTIONS;

EID: 0033877663     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00470-5     Document Type: Article

References (8)

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