Experimental study of hydrogen-free DLC film deposition by XeCl(308 nm) pulsed laser ablation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3885, Issue , 2000, Pages 323-330

  Li, Tie jun ^a   Liu, Jing ru ^a   Wang, Li ge ^a  

^a NORTHWEST INSTITUTE OF NUCLEAR TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; AMORPHOUS FILMS; DEPOSITION; EXCIMER LASERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAPHITE; MICROHARDNESS; PULSED LASER APPLICATIONS; RAMAN SPECTROSCOPY;

PULSED LASER ABLATION;

LASER ABLATION;

EID: 0033875991     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.376977     Document Type: Conference Paper

References (8)