Optical sources, integrated optical detectors and optical waveguides in standard silicon CMOS integrated circuitry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3953, Issue , 2000, Pages 20-36

  Snyman, Lukas W ^a   Aharoni, Herzl ^a   Biber, Alice ^a   Bogalecki, Alfons ^a   Canning, Lyndsay ^a   du Plessis, Monuko ^a   Maree, Petrus ^a  

^a UNIVERSITY OF PRETORIA   (South Africa)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CMOS INTEGRATED CIRCUITS; INFRARED RADIATION; INTEGRATED CIRCUIT MANUFACTURE; INTERMETALLICS; LIGHT EMITTING DIODES; LIGHT SOURCES; OPTICAL WAVEGUIDES; OPTIMIZATION; PHOTODETECTORS; SEMICONDUCTING SILICON;

ALUMINUM METAL LAYERS; INTEGRATED OPTICAL DETECTORS; INTERMETALLIC OXIDES; SILICON LIGHT EMITTING DEVICES;

INTEGRATED OPTOELECTRONICS;

EID: 0033875798     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (33)