Self-compensated heterodyne laser interferometer

International Journal of Advanced Manufacturing Technology

Volumn 16, Issue 3, 2000, Pages 217-219

  Ngoi, B K A ^a   Chin, C S ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ERROR ANALYSIS; HETERODYNING; REFRACTIVE INDEX; SIGNAL ENCODING; VIBRATIONS (MECHANICAL);

SELF-COMPENSATED HETERODYNE LASER INTERFEROMETERS;

INTERFEROMETERS;

EID: 0033875281     PISSN: 02683768     EISSN: None     Source Type: Journal    
DOI: 10.1007/s001700050030     Document Type: Article

References (8)

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3. G. E. Sommergren, "Optical heterodyne prolifometry", Applied Optics 20, p. 610, 1981.
4. Hewlett Packard, Product Description HP 5529A, USA.
5. Excel Precision Corporation, Product Manual, USA, 1997.
6. Renishaw Transducer Systems Limited, User Manual, UK, 1989.
7. F. Z. Fang et al. "Principles of AOM laser heterodyne measuring and its instrument", SPIE Vol 2899, pp. 599-602, 1996.
8. F. Z. Fang, Y. Q. Zhang and G. X. Zhang, "Study of a novel method for refractive index compensation of laser measuring system on the ultraprecision machine tools", Proceedings of ASPE 12th Annual Meeting, pp. 95-99, 1996.