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Volumn 125, Issue 1-3, 2000, Pages 35-39

Pre-treatment of large area strips with the aid of a high power Hall current accelerator

Author keywords

Hall current accelerator; Ionic etching; Kaufman source; Sputter cleaning

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CURRENT VOLTAGE CHARACTERISTICS; GLASS; ION BEAMS; POLYMETHYL METHACRYLATES; SPUTTER DEPOSITION; SURFACE CLEANING;

EID: 0033874604     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00601-5     Document Type: Article
Times cited : (4)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.