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Volumn 125, Issue 1-3, 2000, Pages 35-39
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Pre-treatment of large area strips with the aid of a high power Hall current accelerator
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Author keywords
Hall current accelerator; Ionic etching; Kaufman source; Sputter cleaning
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
CURRENT VOLTAGE CHARACTERISTICS;
GLASS;
ION BEAMS;
POLYMETHYL METHACRYLATES;
SPUTTER DEPOSITION;
SURFACE CLEANING;
HALL CURRENT ACCELERATOR;
KAUFMAN SOURCE;
SPUTTER CLEANING;
PROTECTIVE COATINGS;
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EID: 0033874604
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(99)00601-5 Document Type: Article |
Times cited : (4)
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References (10)
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