Content based image retrieval for semiconductor manufacturing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3966, Issue , 2000, Pages 162-172

  Karnowski, Thomas P ^a   Tobin, Kenneth W ^a   Ferrell, Regina K ^a   Lakhani, Fred ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DATABASE SYSTEMS; IMAGE ANALYSIS; IMAGE QUALITY; INDEXING (OF INFORMATION); INFORMATION RETRIEVAL SYSTEMS; SEMICONDUCTOR DEVICE MANUFACTURE;

CONTENT BASED IMAGE RETRIEVAL;

IMAGING SYSTEMS;

EID: 0033873248     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (18)