Properties of fluoride DUV-excimer laser optics: Influence of the number of dielectric layers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3902, Issue , 2000, Pages 250-258

  Arens, W ^a   Ristau, D ^a   Ullmann, J ^a   Zaczek, C ^a   Thielsch, R ^a   Kaiser, N ^a   Duparre, A ^a   Apel, O ^a   Mann, K ^a   Lauth, H ^a   Bernitzki, H ^a   Ebert, J ^a   Schippel, St ^a   Heyer, H ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; EXCIMER LASERS; FLUORINE COMPOUNDS; LANTHANUM COMPOUNDS; LASER DAMAGE; LIGHT ABSORPTION; LIGHT REFLECTION; LIGHT SCATTERING; MAGNESIUM COMPOUNDS; OPTICAL COATINGS; SPECTROPHOTOMETRY; ULTRAVIOLET RADIATION;

FLUORIDE DEEP ULTRAVIOLET-EXCIMER LASER OPTICS; LASER INDUCED DAMAGE THRESHOLD (LIDT);

LASER OPTICS;

EID: 0033872188     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.379314     Document Type: Conference Paper

References (25)