The structure of nonequilibrium electrode microwave discharge in nitrogen

High Temperature

Volumn 38, Issue 3, 2000, Pages 358-362

  Lebedev, Yu A ^a   Mokeev, M V ^a  

^a TOPCHIEV INSTITUTE OF PETROCHEMICAL SYNTHESIS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ARTICLE; COLLIMATOR; ELECTRODE; ELECTROMAGNETIC RADIATION; MICROWAVE RADIATION; SPATIAL ORIENTATION; STRUCTURE ANALYSIS;

EID: 0033813868     PISSN: 0018151X     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02755991     Document Type: Article

References (14)

1. Diamond deposition in a microwave electrode discharge at reduced pressures
2. Effective low power microwave plasma CVD of carbon nitride films