Corrosion of aluminum nitride (AlN) in aqueous cleaning solutions

Journal of the American Ceramic Society

Volumn 83, Issue 1, 2000, Pages 41-46

  Svedberg, Lynne M ^a   Arndt, Kenneth C ^a,b   Cima, Michael J ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; CORROSION PREVENTION; CORROSION PROTECTION; ELECTROCHEMICAL CORROSION; ION SELECTIVE ELECTRODES; OXIDATION; PH EFFECTS; SOLUTIONS; SURFACES; THERMAL CONDUCTIVITY;

ALUMINUM NITRIDE CORROSION; CORROSION PRODUCT; PROTECTIVE BARRIER LAYER;

ALUMINUM COMPOUNDS;

EID: 0033751785     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.2000.tb01145.x     Document Type: Article

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