Development of a new type piezoelectric micromotor

Sensors and Actuators, A: Physical

Volumn 83, Issue 1, 2000, Pages 244-248

  Suzuki, Y ^a   Tani, K ^a   Sakuhara, T ^a  

^a SEIKO INSTRUMENTS INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FRICTION; MACHINE VIBRATIONS; OSCILLATORS (MECHANICAL); PIEZOELECTRIC TRANSDUCERS; STATORS; TORQUE CONTROL;

PIEZOELECTRIC MICROMOTORS; ULTRASONIC MOTORS;

MICROACTUATORS;

EID: 0033750799     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00391-X     Document Type: Article

References (4)

1. Uchida T., Nakazawa T., Nakamura K., Kurosawa M. Ultrasonic motor utilizing elastic fin rotor. Jpn. J. Appl. Phys. 30:1991;2289-2291.
2. Racine A., Luthier R., de Rooij N.F. Hybrid ultrasonic micromachined motors. Proc. 7th IEEE Int. Conf. Micro Electro Mechanical Systems Workshop (MEMS '93), Fort Lauderdale, Florida, USA, Feb 7-10. 1993;128-132.
3. Bar-Cohen Y., Bao X., Grandia W. Rotary ultrasonic motors actuated by traveling flexural waves. Proc. 6th SPIE Ann. Int. Symposium on Smart Structures and Materials, Newport, CA, USA, March 1-5. 1999;1-5.
4. Tani K., Suzuki M., Furuta K., Sakuhara T., Ataka T. Development of a new type piezoelectric micromotor. Proc. 11th IEEE Ann. Int. Workshop on Micro Electro Mechanical Systems (MEMS '98), Heidelberg, Germany, Jan 25-29. 1998;396-401.