Characterization of the axial symmetric transmission gauge for the measurement of wide pressure range by the Faraday detection

Shinku/Journal of the Vacuum Society of Japan

Volumn 43, Issue 3, 2000, Pages 177-180

  Akimichi, Hitoshi ^a   Takahashi, Naoki ^a   Hayashi, Toshio ^a   Tuzi, Yutaka ^a  

^a ULVAC INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC CURRENT MEASUREMENT; ELECTRON EMISSION; ELECTRON MULTIPLIERS; HYDROGEN; PRESSURE GAGES; SENSITIVITY ANALYSIS;

AXIAL SYMMETRIC TRANSMISSION GAUGE; CONDUCTANCE MODULATION METHOD; ELECTRON STIMULATED DESORPTION; FARADAY DETECTION; ION CURRENT;

PRESSURE MEASUREMENT;

EID: 0033746240     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.43.177     Document Type: Article

References (5)