Novel sputtering method for Pd-Al2O3 UV transparent conductive coatings

Microelectronics Journal

Volumn 31, Issue 6, 2000, Pages 469-473

  Golan, G ^a   Axelevitch, A ^a  

^a OPEN UNIVERSITY OF ISRAEL   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; OPTICAL COATINGS; PALLADIUM; PASSIVATION; SPUTTERING; THIN FILMS;

ULTRAVIOLET TRANSPARENT COATINGS;

OPTICAL FILMS;

EID: 0033738678     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(99)00148-2     Document Type: Article

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