Hydrodynamics of a chemical-mechanical planarization process

Materials Research Society Symposium - Proceedings

Volumn 566, Issue , 1999, Pages 181-186

  Sohn, In Sung ^a   Moudgil, Brij ^b   Singh, Rajiv ^b   Park, C W ^a  

^a J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

^b UNIVERSITY OF FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW OF FLUIDS; HYDRODYNAMICS; MATHEMATICAL MODELS; MICROELECTRONIC PROCESSING; SLURRIES; STRESS CONCENTRATION;

CHEMICAL MECHANICAL PLANARIZATION; THREE DIMENSIONAL FLOW; WAFER SCALE MODEL;

CHEMICAL POLISHING;

EID: 0033737269     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-566-181     Document Type: Article

References (7)

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