pH, pK and pNa detection properties of SiO2/Si3N4 ISFET chemical sensors

Microelectronics Reliability

Volumn 40, Issue 4-5, 2000, Pages 783-786

  Hajji, B ^a   Temple Boyer, P ^a   Launay, J ^a   Do Conto, T ^a   Martinez, A ^a  

^a LAAS CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; PH; SATURATION (MATERIALS COMPOSITION); SEMICONDUCTING SILICON COMPOUNDS; SILICA;

MULTI-ION DETECTION;

ION SENSITIVE FIELD EFFECT TRANSISTORS;

EID: 0033734411     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2714(99)00285-1     Document Type: Article

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