Dimensional changes of Al2O3, MgO, MgAl2O4, AlN and Si3N4 by helium implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 166, Issue , 2000, Pages 165-170

  He, Zhiyong ^a   Jung, P ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ANNEALING; HELIUM; ION BOMBARDMENT; ION IMPLANTATION; MAGNESIA; POINT DEFECTS; RADIATION DAMAGE; SILICON NITRIDE; SWELLING;

ALUMINUM NITRIDE; MAGNESIUM ALUMINATE; VACANCIES;

CERAMIC MATERIALS;

EID: 0033728970     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00741-7     Document Type: Article

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