High speed random separation of microobject in microchip by laser manipulator and dielectrophoresis

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 727-732

  Arai, Fumihito ^a   Ogawa, Masanobu ^a   Fukuda, Toshio ^a   Horio, Koji ^a   Sone, Takeo ^a   Itoigawa, Kouichi ^a   Maeda, Atsushi ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; FORCE CONTROL; PROBES;

MICROCHIPS; MICROPROBES;

MICROPROCESSOR CHIPS;

EID: 0033727386     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (12)