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Volumn , Issue , 2000, Pages 62-65
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Low-k dielectrics for ULSI multilevel interconnections: thickness-dependent electrical and dielectric properties
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CURRENT VOLTAGE CHARACTERISTICS;
ELECTRIC BREAKDOWN;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
PERMITTIVITY;
POLYTETRAFLUOROETHYLENES;
THIN FILMS;
ULSI CIRCUITS;
X RAY DIFFRACTION ANALYSIS;
CURRENT RAMPING VOLTAGE TESTS;
DIELECTRIC BREAKDOWN STRENGTH;
MULTILEVEL INTERCONNECTIONS;
DIELECTRIC FILMS;
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EID: 0033727338
PISSN: 01642006
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (9)
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References (12)
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