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Volumn , Issue , 2000, Pages 62-65

Low-k dielectrics for ULSI multilevel interconnections: thickness-dependent electrical and dielectric properties

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC BREAKDOWN; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PERMITTIVITY; POLYTETRAFLUOROETHYLENES; THIN FILMS; ULSI CIRCUITS; X RAY DIFFRACTION ANALYSIS;

EID: 0033727338     PISSN: 01642006     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (9)

References (12)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.