Effects of DC & AC bias on the dynamic performance of micro resonators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4019, Issue , 2000, Pages 456-461

  Tay, Francis E H ^a   Kumaran, R ^a   Chua, B L ^a   Logeeswaran, V J ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FIELD EFFECTS; ELECTROSTATIC DEVICES; FINITE ELEMENT METHOD; NATURAL FREQUENCIES; RESONATORS; SILICON ON INSULATOR TECHNOLOGY;

ELECTROSTATIC SPRING EFFECTS; MICRORESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033726849     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)