Half-lambda imaging with KrF: Performance challenges and trade-offs as explored through simulation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000, Issue , 2000, Pages

  Slonaker, Steve ^a  

^a NIKON PRECISION INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; IMAGING TECHNIQUES; INTERFEROMETRY; OPTICAL INSTRUMENT LENSES;

CHEMICALLY AMPLIFIED RESISTS; HALF LAMBDA IMAGING;

PHOTORESISTS;

EID: 0033725661     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)