Impacts of strained SiO2 on TDDB lifetime projection

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 2000, Pages 216-217

  Harada, Yoshinao ^a   Eriguchi, Koji ^a   Niwa, Masaaki ^a   Watanabe, Takanobu ^a   Ohdomari, Iwao ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN OF SOLIDS; SEMICONDUCTOR DEVICE MODELS; SILICA; STATISTICAL METHODS;

TIME DEPENDENT DIELECTRIC BREAKDOWN (TDDB);

INTEGRATED CIRCUIT TESTING;

EID: 0033725595     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)