New class of thermal flow sensors using ΔT = 0 as a control signal

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 525-530

  Lammerink, T S J ^a   Tas, N R ^a   Krijnen, G J M ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANEMOMETERS; CALIBRATION; MICROSENSORS; THERMAL VARIABLES MEASUREMENT;

CONSTANT POWER ANEMOMETRY (CPA); CONSTANT TEMPERATURE ANEMOMETRY (CTA); TEMPERATURE BALANCED ANEMOMETRY (TBA); THERMAL FLOW SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033724451     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (12)