Application and improvement of the spreading resistance method for p-type 6H-SiC

Materials Science Forum

Volumn 338, Issue , 2000, Pages

  Gebel, T ^a   Panknin, D ^a   Riehn, R ^a   Parascandola, S ^a   Skorupa, W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ANNEALING; CHEMICAL POLISHING; ELECTRIC RESISTANCE MEASUREMENT; ION IMPLANTATION; SPUTTERING;

SPREADING RESISTANCE (SR) METHODS;

SILICON CARBIDE;

EID: 0033723197     PISSN: 02555476     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (4)