Micromachined micro systems: Miniaturization beyond microelectronics

IEEE Symposium on VLSI Circuits, Digest of Technical Papers

Volumn , Issue , 2000, Pages 6-13

  Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROACTUATORS; MICROELECTRONIC PROCESSING; MICROMACHINING; MICROSENSORS;

MICROSYSTEMS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0033719268     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)