Defects and metrology of ultrathin resist films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3998, Issue , 2000, Pages 515-526

  Okoroanyanwu, Uzodinma ^a   Cobb, Jonathan ^a   Dentinger, Paul ^a   Henderson, Craig ^a   Rao, Veena ^a   Monahan, Kevin ^a   Luo, David ^a   Pike, Christopher ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; INSPECTION; LIGHT ABSORPTION; MOLECULAR WEIGHT; OPTICAL MICROSCOPY; QUALITY CONTROL; ULTRATHIN FILMS; VISCOSITY;

PINHOLES; UITRATHIN RESIST FILMS;

PHOTORESISTS;

EID: 0033719192     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)