MEMS structure-micromirror array

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4019, Issue , 2000, Pages 556-564

  Huja, Martin ^a   Husak, Miroslav ^a  

^a CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTROCHEMICAL ELECTRODES; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; MATHEMATICAL MODELS; MICROACTUATORS; MICROMACHINING; MIRRORS; POLYSILANES;

MICROMIRRORS; POLYSILICON SURFACE MICROMACHINING PROCESS (MUMP);

MICROELECTROMECHANICAL DEVICES;

EID: 0033719138     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)