Robust and versatile software system for optimal design of MEMS structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4019, Issue , 2000, Pages 200-209

  Kwak, Byung Man ^a   Lee, Sang Hoon ^a   Huh, Jae Sung ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMPUTER AIDED DESIGN; COMPUTER AIDED NETWORK ANALYSIS; COMPUTER SIMULATION; ELECTRIC NETWORK SYNTHESIS; FINITE DIFFERENCE METHOD; FINITE ELEMENT METHOD; INTEGRATED CIRCUIT LAYOUT; MATHEMATICAL MODELS; NONLINEAR PROGRAMMING; SENSITIVITY ANALYSIS; STATISTICAL METHODS;

TAGUCHI METHOD;

MICROELECTROMECHANICAL DEVICES;

EID: 0033718769     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)