Sensing characteristics of ISFET based on AlN thin film

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4078, Issue , 2000, Pages 689-696

  Chiang, Jung Lung ^a   Jan, Shiun Sheng ^a   Chen, Ying Chung ^a   Chou, Jung Chuan ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC INSULATORS; PH EFFECTS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING FILMS; THIN FILMS; THRESHOLD VOLTAGE;

ALUMINUM NITRIDE; CAPACITANCE-VOLTAGE CHARACTERISTICS;

ION SENSITIVE FIELD EFFECT TRANSISTORS;

EID: 0033718432     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.392108     Document Type: Conference Paper

References (15)