Cluster ion beam smoothing of SiC and YBCO surfaces

Materials Letters

Volumn 44, Issue 3, 2000, Pages 248-252

  Fathy, D ^a   Holland, O W ^b   Liu, R ^a   Wosik, J ^a   Chu, W K ^a  

^a UNIVERSITY OF HOUSTON   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; HIGH TEMPERATURE SUPERCONDUCTORS; ION BEAMS; ION BOMBARDMENT; SILICON CARBIDE; SUPERCONDUCTING FILMS; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; YTTRIUM BARIUM COPPER OXIDES;

CLUSTER ION BEAM SMOOTHING; CLUSTER ION IRRADIATION; GAS CLUSTER ION BEAMS; MICROWAVE SURFACE RESISTANCE; SURFACE PLANARIZATION; SURFACE SMOOTHING;

SURFACE TOPOGRAPHY;

EID: 0033717054     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(00)00037-9     Document Type: Article

References (7)

1. Chu W.K.et al. Smoothing of YBCO films by cluster beam bombardment. Appl. Phys. Lett. 1997.
2. Yamada I. A short review of ionized cluster beam technology. Nucl. Instrum. Methods Phys. Res., Sect. B. 99:1995;240-243.
3. McHargue C.J., Williams J.M. Nucl. Instrum. Methods B. 80/81:1993;889.
4. Wosik J.et al. Power handling capabilities of superconducting YBCO thin films: thermally induced nonlinearly effects. J. Supercond. 10(2):1997.
5. Yamada I., Takaoka G.H., Akizuki M., Yamashita Y., Ishii M. Nucl. Instrum. Methods B. 74:1993;341.
6. Inoue T. Film stability of YBCO microwave resonator in humid conditions. Advances in superconductivity. Proc. IX Int. Conf. 2:1996.
7. In press.