Electrical properties of ultra thin tin oxide films

Materials Research Society Symposium - Proceedings

Volumn 558, Issue , 2000, Pages 393-398

  Matsui, Yuji ^a   Goto, Yoshio ^a  

^a New Products Dev Ctr   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; ELECTRIC PROPERTIES; FLUORINE; HEAT TREATMENT; OXIDES; THICKNESS MEASUREMENT; ULTRATHIN FILMS;

ATMOSPHERIC CHEMICAL VAPOR DEPOSITION; CONDUCTIVE OXIDE FILMS; HYDROLYTIC DECOMPOSITION; STANNIC CHLORIDE; TIN OXIDE;

CONDUCTIVE FILMS;

EID: 0033716499     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)