Fabrication of a micro electromagnetic flow sensor for micro flow rate measurement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3990, Issue , 2000, Pages 264-271

  Yoon, Hyeun Joong ^a   Kim, Soon Young ^a   Lee, Sang Woo ^a   Yang, Sang Sik ^a  

^a Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTANCE; ELECTRODES; ELECTROMAGNETISM; ETCHING; EVAPORATION; FLOW MEASUREMENT; MAGNETIC FIELD EFFECTS; MICROSENSORS; PERMANENT MAGNETS; SILICON WAFERS;

ELECTROMOTIVE FORCE; FARADAY'S LAW; MICRO ELECTROMAGNETIC FLOW SENSORS; MICRO FLOW RATE MEASUREMENT; MICROFLOW CHANNELS;

FLOWMETERS;

EID: 0033715940     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)