Effects of nitrogen on the activation/deactivation of boron and indium in N-channel CMOS devices

International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

Volumn , Issue , 2000, Pages 159-162

  Aronowitz, Sheldon ^a   Puchner, Helmut ^a   Zubkov, Vladimir ^a  

^a AGERE SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ANALYSIS; CRYSTAL LATTICES; GATES (TRANSISTOR); MOLECULAR DYNAMICS; NITROGEN; SEMICONDUCTING BORON; SEMICONDUCTING INDIUM; SEMICONDUCTOR DOPING; THRESHOLD VOLTAGE;

ACTIVATION-DEACTIVATION BEHAVIOR; MOLECULAR ORBITALS;

CMOS INTEGRATED CIRCUITS;

EID: 0033715803     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)