Coupling of length scales in MEMS modeling: The atomic limit of finite elements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4019, Issue , 2000, Pages 16-25

  Rudd, Robert E ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; RESONATORS; SILICON;

SILICON RESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033715703     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)